Cost-effective mini SEM with Max. 150,000 x of magnification by miniaturizing modules of nomal SEM
S/W navigation mode
Dual imaging detector (SE & BSE), High & Low vacuum modes
Cost-effective mini SEM with Max. 100,000 x of magnification by miniaturizing modules of nomal SEM
Able to scan images with high resolution of 5nm by variable apertrue
Table-top SEM with 15 nm resolution & 60,000 x magnification
Various detectors which create surface information images (SE) and material information images (BSE)